EP 0461782 A3 19920129 - CONVERSION OF SILICA PRECURSORS TO SILICA AT LOW TEMPERATURES

Title (en)

CONVERSION OF SILICA PRECURSORS TO SILICA AT LOW TEMPERATURES

Publication

EP 0461782 A3 19920129 (EN)

Application

EP 91304882 A 19910530

Priority

US 53282890 A 19900604

Abstract (en)

[origin: EP0461782A2] This invention relates to a low temperature method of converting silica precursor coatings to ceramic silica coatings. The method comprises applying a silica precursor coating to a substrate, exposing the coating to an environment comprising ammonium hydroxide and/or wet ammonia vapors and subjecting the coating to a temperature sufficient to yield the ceramic coating. The methods of the invention are particularly applicable to applying coatings on electronic devices.

IPC 1-7

H01L 21/316; C04B 35/14; C04B 35/64

IPC 8 full level

C09D 183/02 (2006.01); B05D 7/24 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); C09D 183/00 (2006.01); C09D 183/04 (2006.01); H01L 21/316 (2006.01); H05K 3/24 (2006.01); H05K 3/46 (2006.01)

CPC (source: EP KR US)

C04B 41/009 (2013.01 - EP US); C04B 41/5035 (2013.01 - EP US); C04B 41/87 (2013.01 - EP US); C09D 183/02 (2013.01 - KR); H01L 21/02123 (2013.01 - EP KR US); H01L 21/02205 (2013.01 - EP KR US); H01L 21/02216 (2013.01 - EP KR US); H01L 21/02282 (2013.01 - KR US); H01L 21/02337 (2013.01 - US); H01L 21/316 (2016.02 - US); C04B 2111/00844 (2013.01 - EP US); H01L 21/02282 (2013.01 - EP)

C-Set (source: EP US)

C04B 41/5035 + C04B 41/4519 + C04B 41/4554 + C04B 41/5025
C04B 41/009 + C04B 35/00

Citation (search report)

[A] EP 0323186 A2 19890705 - DOW CORNING [US]
[A] EP 0270241 A2 19880608 - DOW CORNING [US]
[AD] US 4636440 A 19870113 - JADA SIVANANDA S [US]

Designated contracting state (EPC)

DE ES FR GB IT NL

DOCDB simple family (publication)

EP 0461782 A2 19911218; EP 0461782 A3 19920129; EP 0461782 B1 19931006; CA 2042694 A1 19911205; DE 69100467 D1 19931111; DE 69100467 T2 19940428; ES 2047379 T3 19940216; JP H04227980 A 19920818; JP H0623333 B2 19940330; KR 920000891 A 19920129; KR 950009548 B1 19950824; TW 229235 B 19940901; US 5262201 A 19931116

DOCDB simple family (application)

EP 91304882 A 19910530; CA 2042694 A 19910515; DE 69100467 T 19910530; ES 91304882 T 19910530; JP 13110991 A 19910603; KR 910009186 A 19910604; TW 80104055 A 19910524; US 53282890 A 19900604