EP 0462377 B1 19960522 - Ion source
Title (en)
Ion source
Title (de)
Ionenquelle
Title (fr)
Source d'ions
Publication
Application
Priority
DE 4019729 A 19900621
Abstract (en)
[origin: EP0462377A2] The invention relates to an ion source having a gas container (50) and an RF excitation coil (1) surrounding this container (50), and having an amplifier element (7) which has a control electrode. In this case, the RF excitation coil (1) is connected to an electrode (6) of the amplifier element (7), while the control electrode of this amplifier element (7) is connected, in terms of AC, to this RF excitation coil (1). The gas container (50), together with RF excitation coil (1), and the amplifier element (7) are jointly located in a housing (19) having metallic walls. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 27/14 (2006.01); H01J 27/16 (2006.01); H01J 37/08 (2006.01)
CPC (source: EP US)
H01J 27/16 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB LI NL SE
DOCDB simple family (publication)
EP 0462377 A2 19911227; EP 0462377 A3 19920513; EP 0462377 B1 19960522; DE 4019729 A1 19920102; DE 59107831 D1 19960627; JP H06342637 A 19941213; US 5124526 A 19920623
DOCDB simple family (application)
EP 91106642 A 19910425; DE 4019729 A 19900621; DE 59107831 T 19910425; JP 17768491 A 19910621; US 66225991 A 19910228