EP 0465695 B1 19960925 - Spherical electrode type charged particle analyzer
Title (en)
Spherical electrode type charged particle analyzer
Title (de)
Analysator für geladene Teilchen mit sphärischer Elektrode
Title (fr)
Analyseur de particules chargées à électrode sphérique
Publication
Application
Priority
EP 90113101 A 19900709
Abstract (en)
[origin: EP0465695A1] A charged particle analyzer comprises a spherical grid (1), a spherical electrode (2) concentric therewith, an emission portion (W) for emitting charged particles, a screen plate (3) having an exit opening (A), a plurality of second spherical grids (8,81,91,9) forming a high pass filter for the charged particles, a detector (4) for detecting the charged particles, and an obstacle ring (10) being in parallel with an equatorial plane normal to a line connecting the emission portion and the center of the exit opening with being within the spherical electrode (2). <IMAGE>
IPC 1-7
IPC 8 full level
H01J 49/48 (2006.01)
CPC (source: EP)
H01J 49/484 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0465695 A1 19920115; EP 0465695 B1 19960925; DE 69028700 D1 19961031; DE 69028700 T2 19970430
DOCDB simple family (application)
EP 90113101 A 19900709; DE 69028700 T 19900709