Global Patent Index - EP 0469631 A3

EP 0469631 A3 19920701 - ION PUMP AND VACUUM PUMPING UNIT USING THE SAME

Title (en)

ION PUMP AND VACUUM PUMPING UNIT USING THE SAME

Publication

EP 0469631 A3 19920701 (EN)

Application

EP 91113057 A 19910802

Priority

JP 20522490 A 19900803

Abstract (en)

[origin: EP0469631A2] An exhaust apparatus (50) and a vacuum pumping unit (100) using the exhaust apparatus are disclosed. The exhaust apparatus (50) comprises a thermionic emission source (21), an electron accelerating grid (22) surrounding the thermionic emission source, an outer electrode (23) surrounding the electron accelerating grid, an ion accelerating grid (24) intersecting an axis of the outer electrode and installed apart from the outer electrode, a vessel (25) containing the thermionic emission source, the electron accelerating grid, the outer electrode, and the ion accelerating grid therein, a magnet (26) disposed outside of the vessel and generating a magnetic field almost parallel to the axis of the outer electrode, a power supply (29) for heating the thermionic emission source, a first DC power supply for applying a voltage between the electron accelerating grid, the outer electrode (23) and the thermionic emission source (21), a second DC power supply for applying a voltage between the outer electrode and the ion accelerating grid so as to get the outer electrode positive. The vacuum pumping unit (100) is constituted by interposing the exhaust (50) apparatus between a vacuum vessel to be evacuated and an auxiliary vacuum pump. By this, gas molecules in the vacuum vessel (25) are ionized by electron bombardment and accelerated toward the auxiliary vacuum pump (31) to be exhausted. <IMAGE>

IPC 1-7

H01J 41/14

IPC 8 full level

H01J 41/14 (2006.01); H01J 41/18 (2006.01)

CPC (source: EP)

H01J 41/14 (2013.01)

Citation (search report)

Designated contracting state (EPC)

AT BE CH DE DK ES FR GB GR IT LI LU NL SE

DOCDB simple family (publication)

EP 0469631 A2 19920205; EP 0469631 A3 19920701; EP 0469631 B1 19960717; AT E140560 T1 19960815; DE 69120874 D1 19960822; DE 69120874 T2 19970227; JP H0492353 A 19920325; JP H0675386 B2 19940921

DOCDB simple family (application)

EP 91113057 A 19910802; AT 91113057 T 19910802; DE 69120874 T 19910802; JP 20522490 A 19900803