EP 0470130 A4 19920701 - LIQUID PHASE EPITAXY
Title (en)
LIQUID PHASE EPITAXY
Publication
Application
Priority
- AU 5547690 A 19900424
- AU PJ390989 A 19890426
Abstract (en)
[origin: WO9012905A1] Liquid phase epitaxially grown crystals are prepared in a tilt tube apparatus pivotable about a pivoting arrangement (21). The apparatus comprises a silica crucible (10) within a silica reaction tube (11) having a palladium diffused hydrogen atmosphere which is heated by electric furnace (12). The crucible (10) is in contact with a silica rod (13) which is connected through a flexible coupling (15) to a transducer (14) which draws power from a power oscillator (17). Vibrations are thereby induced in the crucible (10) during preparation of a crystal.
IPC 1-7
IPC 8 full level
C30B 19/02 (2006.01); C30B 19/04 (2006.01); C30B 19/06 (2006.01)
CPC (source: EP)
C30B 19/02 (2013.01); C30B 19/04 (2013.01); C30B 19/06 (2013.01)
Citation (search report)
- [A] PATENT ABSTRACTS OF JAPAN vol. 13, no. 29 (C-562)23 January 1989 & JP-A-63 233 094 ( FUJITSU LTD ) 28 September 1988
- [A] PATENT ABSTRACTS OF JAPAN vol. 13, no. 11 (C-558)11 January 1989 & JP-A-63 218 595 ( TOSHIBA CORP ) 12 September 1988
- [A] JOURNAL OF CRYSTAL GROWTH. vol. 42, 1977, AMSTERDAM NL pages 301 - 308; H.J. SCHEEL: 'A NEW TECHNIQUE FOR MULTILAYER LPE'
- See references of WO 9012905A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9012905 A1 19901101; EP 0470130 A1 19920212; EP 0470130 A4 19920701
DOCDB simple family (application)
AU 9000163 W 19900424; EP 90906735 A 19900424