EP 0480518 B1 19950201 - Electron source providing a particle retention device.
Title (en)
Electron source providing a particle retention device.
Title (de)
Elektronenquelle mit teilchenhaltender Anordnung.
Title (fr)
Source d'électrons présentant un dispositif de rétention de matières.
Publication
Application
Priority
FR 9012613 A 19901012
Abstract (en)
[origin: JPH04274149A] PURPOSE: To separate most suitably plasma from extraction region electrically by a vacuum arc electron source with a plasma generator, wherein an anode and a cathode are arranged facing each other to generate plasma when adding appropriate electric potential between the anode and the cathode, a plasma extraction device and a substance holding device arranged between the electron extraction device and the plasma generator. CONSTITUTION: One or more conductive upstream baffles 10 and downstream baffles 20 are composed with a substance holding device arranged in the direction of electron extraction, and these baffles have holes 16, 26 arranged in five-point shape and when electric potential of these baffles are regulated in fixed values, plasma P is controlled so as not to extend to the downside of the downstream baffle 20.
IPC 1-7
IPC 8 full level
G21K 1/00 (2006.01); H01J 3/02 (2006.01); H01J 37/077 (2006.01)
CPC (source: EP US)
H01J 3/025 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0480518 A1 19920415; EP 0480518 B1 19950201; DE 69107162 D1 19950316; DE 69107162 T2 19950831; FR 2667980 A1 19920417; JP H04274149 A 19920930; US 5256931 A 19931026
DOCDB simple family (application)
EP 91202587 A 19911003; DE 69107162 T 19911003; FR 9012613 A 19901012; JP 26228491 A 19911009; US 77565491 A 19911010