EP 0482230 B1 19950621 - High power radiation device.
Title (en)
High power radiation device.
Title (de)
Hochleistungsstrahler.
Title (fr)
Dispositif de rayonnement à haute puissance.
Publication
Application
Priority
EP 90120261 A 19901022
Abstract (en)
[origin: JPH04264349A] PURPOSE: To realize a high output beam generating apparatus that enables manufacture of economical and constituting of an extremely large surface beam generator based on the modular structure. CONSTITUTION: A plurality of dielectric tubes 6 having inner electrodes 7 are provided inside quarts forming bodies with a rectangle shape cross section at a UV high output beam. A filling gas is filled in the inner space of tubes that generate a UV beam under the discharging condition. A power supply structure is as follows, i.e., discharge sections 17 are formed between neighboring dielectric tubes 6. The superior features of this structure are compactness, economy, and ease of service.
IPC 1-7
IPC 8 full level
H01J 61/30 (2006.01); H01J 61/35 (2006.01); H01J 61/52 (2006.01); H01J 61/54 (2006.01); H01J 65/00 (2006.01); H01J 65/04 (2006.01); H01S 3/03 (2006.01); H01S 3/038 (2006.01); H01S 3/097 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP US)
H01J 65/046 (2013.01 - EP US)
Designated contracting state (EPC)
BE CH DE FR GB IT LI NL
DOCDB simple family (publication)
EP 0482230 A1 19920429; EP 0482230 B1 19950621; DE 59009300 D1 19950727; JP 2580266 Y2 19980903; JP H04264349 A 19920921; JP H081671 U 19961217; US 5283498 A 19940201
DOCDB simple family (application)
EP 90120261 A 19901022; DE 59009300 T 19901022; JP 27363191 A 19911022; JP 437496 U 19960521; US 77040891 A 19911003