EP 0497534 A2 19920805 - Piezoresistive pressure transducer with a conductive elastomeric seal.
Title (en)
Piezoresistive pressure transducer with a conductive elastomeric seal.
Title (de)
Piezoresistiver Druckwandler mit leitender, elastomerer Abdichtung.
Title (fr)
Capteur de pression piézorésistif avec un scellement conductif élastomérique.
Publication
Application
Priority
US 64656891 A 19910128
Abstract (en)
A low cost piezoresistive pressure transducer 10 utilizes premolded elastomeric seals 30, 32 in which at least one seal is electrically conductive. A piezoresistive stress sensitive element in the form of a diaphragm 34 of semiconductor material having a thickened rim is held at its rim between a pair of premolded elastomeric seals 30, 32 in a two piece housing 12, 20. Electrical connections with external circuitry are made by conductive paths through one of the elastomeric seals which makes contact with electrical leads which pass through the housing wall. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 29/84 (2006.01); G01L 9/00 (2006.01); G01L 9/04 (2006.01); G01L 9/14 (2006.01)
CPC (source: EP)
G01L 19/0084 (2013.01); G01L 19/143 (2013.01); G01L 19/146 (2013.01); G01L 19/147 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0497534 A2 19920805; EP 0497534 A3 19930818; EP 0497534 B1 19960731; CA 2058916 A1 19920729; CA 2058916 C 20000321; DE 69212507 D1 19960905; DE 69212507 T2 19970206; JP 2800083 B2 19980921; JP H0621482 A 19940128
DOCDB simple family (application)
EP 92300676 A 19920127; CA 2058916 A 19920107; DE 69212507 T 19920127; JP 2910592 A 19920121