EP 0499239 B1 19990707 - Ion pump and vacuum pumping unit using the same
Title (en)
Ion pump and vacuum pumping unit using the same
Title (de)
Ionenpumpe und Vakuumpumpanlage dafür
Title (fr)
Pompe ionique et unité de pompage à vide utilisant celle-ci
Publication
Application
Priority
- JP 3884791 A 19910212
- JP 3884891 A 19910212
Abstract (en)
[origin: EP0499239A2] An exhaust apparatus and a high vacuum pumping unit including such high vacuum device (50) and an auxiliary vacuum pump (31) are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
IPC 1-7
IPC 8 full level
H01J 41/14 (2006.01); H01J 41/18 (2006.01)
CPC (source: EP)
H01J 41/14 (2013.01); H01J 41/18 (2013.01)
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0499239 A2 19920819; EP 0499239 A3 19930303; EP 0499239 B1 19990707; AT E182031 T1 19990715; DE 69229511 D1 19990812; DE 69229511 T2 20000203; JP H05174780 A 19930713
DOCDB simple family (application)
EP 92102346 A 19920212; AT 92102346 T 19920212; DE 69229511 T 19920212; JP 4753392 A 19920203