EP 0502303 B1 19950531 - Process for treating objects with a gas comprising fluor, and apparatus for carrying out the process.
Title (en)
Process for treating objects with a gas comprising fluor, and apparatus for carrying out the process.
Title (de)
Verfahren zur Behandlung von Gegenständen mit einem Fluor enthaltenden Gas sowie Vorrichtung zu seiner Durchführung.
Title (fr)
Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien.
Publication
Application
Priority
DE 4105179 A 19910220
Abstract (en)
[origin: EP0502303A1] For the pretreatment of objects with fluorine, a stock vessel (1) is provided in which the gas used for the treatment is prepared and held ready under a reduced pressure of about 0.2 bar. The objects to be treated are introduced into a reaction chamber (2, 3) which is likewise evacuated after closing. The gas is then pumped from the stock vessel (1) into the particular reaction chamber (2, 3). After the pretreatment with fluorine, the gas is passed back into the stock vessel (1) and from there, after renewed adjustment of the fluorine concentration by adding fluorine, again fed to a reaction chamber (2 or 3). <IMAGE>
IPC 1-7
IPC 8 full level
B05C 9/10 (2006.01); B05D 3/04 (2006.01); C23C 8/06 (2006.01)
CPC (source: EP)
B05C 9/10 (2013.01); B05D 3/044 (2013.01); C23C 8/06 (2013.01)
Designated contracting state (EPC)
DE ES FR GB IT SE
DOCDB simple family (publication)
EP 0502303 A1 19920909; EP 0502303 B1 19950531; DE 4105179 A1 19920827; DE 59202375 D1 19950706; ES 2073194 T3 19950801
DOCDB simple family (application)
EP 92101160 A 19920124; DE 4105179 A 19910220; DE 59202375 T 19920124; ES 92101160 T 19920124