EP 0513275 B1 19950809 - WAFER CARRIER.
Title (en)
WAFER CARRIER.
Title (de)
WAFERTRÄGER.
Title (fr)
SUPPORT POUR TRANCHES.
Publication
Application
Priority
- US 9107182 W 19910930
- US 62027490 A 19901130
Abstract (en)
[origin: US5111936A] A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the axially aligned wafers in the carrier. The carrier has a pair of opposed upright end walls with one upright end wall being indexable upon the transfer equipment. The one end wall has opposing transfer equipment to contact rails each with upper and lower portions. An arch is formed between the upper and lower portions thereby forming a 4-point contact with the transfer equipment.
IPC 1-7
IPC 8 full level
B65D 85/00 (2006.01); B65D 85/57 (2006.01); B65D 85/86 (2006.01); H01L 21/673 (2006.01)
CPC (source: EP KR US)
H01L 21/00 (2013.01 - KR); H01L 21/67326 (2013.01 - EP US); Y10S 206/833 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
US 5111936 A 19920512; DE 69112037 D1 19950914; DE 69112037 T2 19960111; EP 0513275 A1 19921119; EP 0513275 B1 19950809; JP 2546944 B2 19961023; JP H05503813 A 19930617; KR 0175918 B1 19990501; KR 920704331 A 19921219; WO 9210001 A1 19920611
DOCDB simple family (application)
US 62027490 A 19901130; DE 69112037 T 19910930; EP 91920089 A 19910930; JP 51845591 A 19910930; KR 920701806 A 19920730; US 9107182 W 19910930