Global Patent Index - EP 0523042 B1

EP 0523042 B1 19940622 - ULTRAFAST ELECTRO-DYNAMIC X, Y AND THETA POSITIONING STAGE.

Title (en)

ULTRAFAST ELECTRO-DYNAMIC X, Y AND THETA POSITIONING STAGE.

Title (de)

ULTRASCHNELLER ELEKTRO-DYNAMISCHER X, Y UND THETA POSITIONIERUNGSTISCH.

Title (fr)

ETAGE DE POSITIONNEMENT X, Y ET THETA ELECTRODYNAMIQUE ET ULTRARAPIDE.

Publication

EP 0523042 B1 19940622

Application

EP 90915253 A 19900928

Priority

  • US 9005563 W 19900928
  • US 51374990 A 19900406

Abstract (en)

[origin: US5153494A] The invention discloses an Ultrafast Electro-Dynamic X, Y and Theta Positioning Stage. A positioning stage made according to this invention allows light payloads to be moved with extremely high linear and angular accelerations over finite distances and angles with a plane. An important feature of this invention is a momentum-cancelling design which allows reaction forces and torques on the fixed member to approach zero, thereby, allowing for a smooth and an ultrafast performance by the positioning stage.

IPC 1-7

B23Q 11/00; B23Q 15/02; B23Q 1/26; H02K 41/02

IPC 8 full level

B23Q 1/00 (2006.01); B23Q 1/26 (2006.01); B23Q 1/38 (2006.01); B23Q 1/48 (2006.01); B23Q 5/28 (2006.01); B23Q 11/00 (2006.01); B23Q 16/00 (2006.01); G01N 13/10 (2006.01); G01Q 10/04 (2010.01); G03F 7/20 (2006.01); G05B 1/06 (2006.01); H01L 21/30 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H02K 41/02 (2006.01); H02K 41/035 (2006.01)

CPC (source: EP US)

B23Q 1/26 (2013.01 - EP US); B23Q 11/001 (2013.01 - EP US); B82Y 35/00 (2013.01 - US); G01Q 10/04 (2013.01 - EP US); G03F 7/70766 (2013.01 - EP US); G03F 7/70816 (2013.01 - EP US); G03F 7/70858 (2013.01 - EP US); H02K 41/0356 (2013.01 - EP US); B26D 2007/0043 (2013.01 - EP US); H02K 2201/18 (2013.01 - EP US)

Citation (examination)

Designated contracting state (EPC)

BE CH DE ES FR GB IT LI LU NL SE

DOCDB simple family (publication)

WO 9115333 A2 19911017; WO 9115333 A3 19920220; DE 69010218 D1 19940728; DE 69010218 T2 19950209; EP 0523042 A1 19930120; EP 0523042 B1 19940622; JP 2528552 B2 19960828; JP H05504100 A 19930701; US 5153494 A 19921006

DOCDB simple family (application)

US 9005563 W 19900928; DE 69010218 T 19900928; EP 90915253 A 19900928; JP 51418590 A 19900928; US 51374990 A 19900406