EP 0523042 B1 19940622 - ULTRAFAST ELECTRO-DYNAMIC X, Y AND THETA POSITIONING STAGE.
Title (en)
ULTRAFAST ELECTRO-DYNAMIC X, Y AND THETA POSITIONING STAGE.
Title (de)
ULTRASCHNELLER ELEKTRO-DYNAMISCHER X, Y UND THETA POSITIONIERUNGSTISCH.
Title (fr)
ETAGE DE POSITIONNEMENT X, Y ET THETA ELECTRODYNAMIQUE ET ULTRARAPIDE.
Publication
Application
Priority
- US 9005563 W 19900928
- US 51374990 A 19900406
Abstract (en)
[origin: US5153494A] The invention discloses an Ultrafast Electro-Dynamic X, Y and Theta Positioning Stage. A positioning stage made according to this invention allows light payloads to be moved with extremely high linear and angular accelerations over finite distances and angles with a plane. An important feature of this invention is a momentum-cancelling design which allows reaction forces and torques on the fixed member to approach zero, thereby, allowing for a smooth and an ultrafast performance by the positioning stage.
IPC 1-7
IPC 8 full level
B23Q 1/00 (2006.01); B23Q 1/26 (2006.01); B23Q 1/38 (2006.01); B23Q 1/48 (2006.01); B23Q 5/28 (2006.01); B23Q 11/00 (2006.01); B23Q 16/00 (2006.01); G01N 13/10 (2006.01); G01Q 10/04 (2010.01); G03F 7/20 (2006.01); G05B 1/06 (2006.01); H01L 21/30 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H02K 41/02 (2006.01); H02K 41/035 (2006.01)
CPC (source: EP US)
B23Q 1/26 (2013.01 - EP US); B23Q 11/001 (2013.01 - EP US); B82Y 35/00 (2013.01 - US); G01Q 10/04 (2013.01 - EP US); G03F 7/70766 (2013.01 - EP US); G03F 7/70816 (2013.01 - EP US); G03F 7/70858 (2013.01 - EP US); H02K 41/0356 (2013.01 - EP US); B26D 2007/0043 (2013.01 - EP US); H02K 2201/18 (2013.01 - EP US)
Citation (examination)
- DE 2603680 A1 19770804 - PHILIPS PATENTVERWALTUNG
- EP 0333128 A2 19890920 - HITACHI LTD [JP]
- EP 0132883 A2 19850213 - PHILIPS PATENTVERWALTUNG [DE], et al
- US 4514674 A 19850430 - HOLLIS JR RALPH L [US], et al
- DE 2739220 A1 19780427 - XEROX CORP
- EP 0113008 A1 19840711 - IBM [US]
- DE 3037648 A1 19810430 - JENOPTIK JENA GMBH [DD]
- JP S5976164 A 19840501 - TOSHIBA KK
- JP S61209838 A 19860918 - OMRON TATEISI ELECTRONICS CO
- WO 8200389 A1 19820204 - SCHMIDT G [DE]
- GB 2132034 A 19840627 - MAGNETIC PERIPHERALS INC
- EP 0393994 A2 19901024 - SHARP KK [JP]
Designated contracting state (EPC)
BE CH DE ES FR GB IT LI LU NL SE
DOCDB simple family (publication)
WO 9115333 A2 19911017; WO 9115333 A3 19920220; DE 69010218 D1 19940728; DE 69010218 T2 19950209; EP 0523042 A1 19930120; EP 0523042 B1 19940622; JP 2528552 B2 19960828; JP H05504100 A 19930701; US 5153494 A 19921006
DOCDB simple family (application)
US 9005563 W 19900928; DE 69010218 T 19900928; EP 90915253 A 19900928; JP 51418590 A 19900928; US 51374990 A 19900406