EP 0527082 B1 19960508 - Wave guide-type electron cyclotron resonance ion source producing multicharged ions
Title (en)
Wave guide-type electron cyclotron resonance ion source producing multicharged ions
Title (de)
Elektroncyclotionresonanz-Ionenquelle vom Wellenleiter-Typ zur Erzeugung mehrfachgeladenen Ionen
Title (fr)
Source d'ions multicharges à résonance cyclotronique électronique de type guide d'ondes
Publication
Application
Priority
FR 9109945 A 19910805
Abstract (en)
[origin: EP0527082A1] Waveguide-type electron cyclotron resonance ion source producing multicharged ions. This source comprises a leaktight enclosure (2) surrounding a gaseous medium capable of being ionised to form a plasma containing electrons accelerated by electron cyclotron resonance, this enclosure including a longitudinal axis (4), a first (6) and a second (8) end along this axis; means (12) of injecting an electromagnetic field of frequency greater than or equal to 6GHz into the enclosure, in the region of its first end, in order to ionise the gaseous medium; means (32, 34, 36, 38) for creating, in the enclosure, an axially symmetric magnetic field whose value of induction B is a minimum in a midplane of the enclosure, perpendicular to the axis; permanent magnets (40, 42, 44) for creating a radially symmetric magnetic field; an ion extraction system (28) situated in the region of the second end, and is characterised in that the enclosure is a waveguide having a width (l) along the midplane (P) such that 0.5 & l/g & 1.5 where g represents the wavelength of the electromagnetic field satisfying the resonance condition and in that the means for creating the axially symmetric field consist of permanent magnets. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 27/18 (2006.01)
CPC (source: EP)
H01J 27/18 (2013.01)
Designated contracting state (EPC)
BE DE FR GB IT NL
DOCDB simple family (publication)
EP 0527082 A1 19930210; EP 0527082 B1 19960508; DE 69210501 D1 19960613; DE 69210501 T2 19961212; FR 2680275 A1 19930212; FR 2680275 B1 19970718
DOCDB simple family (application)
EP 92402219 A 19920803; DE 69210501 T 19920803; FR 9109945 A 19910805