EP 0527166 B1 19950614 - ILLUMINATION DEVICE.
Title (en)
ILLUMINATION DEVICE.
Title (de)
BELICHTUNGSVORRICHTUNG.
Title (fr)
DISPOSITIF D'EXPOSITION A LA LUMIERE.
Publication
Application
Priority
- DE 9100375 W 19910502
- DE 4014131 A 19900502
Abstract (en)
[origin: US5296891A] PCT No. PCT/DE91/00375 Sec. 371 Date Oct. 29, 1992 Sec. 102(e) Date Oct. 29, 1992 PCT Filed May 2, 1991 PCT Pub. No. WO91/17483 PCT Pub. Date Nov. 14, 1991.The illumination device (1) proposed is designed to produce models (6), or for the direct illumination of electronic elements, and includes a light source (2) and a pattern generator (3). In order to shorten the necessary writing time or exposure time with a simplified illumination-device structure, the pattern generator (3) includes an optical schlieren system (15, 17) and an active, matrix-addressable surface light generator (13) which has a viscoelastic control layer with a reflective surface (19). Disposed between the schlieren lens (15) and the projection lens (16) in the schlieren system (14) is a mirror device (17) which preferably has two functions, not only deflecting the light from the light source (2) to the surface light modulator (13) but also filtering out undiffracted reflected light. The schlieren lens is located at a distance from the surface light modulator (13) which is short relative to the focal length of the lens. A positioning table (7) designed to hold the model (6), or the electronic element is disposed in such a way that sharp images of surface areas (19a, 19b) of the surface light modulator (13) can be produced on the model or the electronic element.
IPC 1-7
IPC 8 full level
G03F 1/08 (2006.01); G03F 1/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/30 (2006.01); H01S 3/101 (2006.01)
CPC (source: EP US)
G03F 7/70216 (2013.01 - EP); G03F 7/70283 (2013.01 - EP US); G03F 7/70291 (2013.01 - EP US); G03F 7/70358 (2013.01 - EP US); G03F 7/70425 (2013.01 - EP US)
Designated contracting state (EPC)
AT CH DE FR LI NL SE
DOCDB simple family (publication)
WO 9117483 A1 19911114; AT E123885 T1 19950615; DE 59105735 D1 19950720; EP 0527166 A1 19930217; EP 0527166 B1 19950614; JP 2938568 B2 19990823; JP H05502141 A 19930415; US 5296891 A 19940322
DOCDB simple family (application)
DE 9100375 W 19910502; AT 91908272 T 19910502; DE 59105735 T 19910502; EP 91908272 A 19910502; JP 50812291 A 19910502; US 94095892 A 19921029