EP 0528386 B1 19990324 - Calibration system for ultra high purity gas analysis
Title (en)
Calibration system for ultra high purity gas analysis
Title (de)
Kalibrierungssystem für die Analyse von ultrahoch reinen Gasen
Title (fr)
Système de calibration pour l'analyse de gaz de pureté ultra haute
Publication
Application
Priority
US 74569791 A 19910816
Abstract (en)
[origin: EP0528386A2] A calibration device is provided for rapidly delivering ultra high purity calibration gas mixtures, and sample gas, to a gas analyzer at elevated temperature conditions. Steady flow rates are desirably provided to the highly sensitive analyzer. <IMAGE>
IPC 1-7
IPC 8 full level
B01F 23/10 (2022.01); G01N 33/00 (2006.01)
CPC (source: EP KR US)
B01F 23/19 (2022.01 - EP US); G01N 27/26 (2013.01 - KR); G01N 33/0006 (2013.01 - EP US)
Designated contracting state (EPC)
BE DE ES FR IT
DOCDB simple family (publication)
EP 0528386 A2 19930224; EP 0528386 A3 19940824; EP 0528386 B1 19990324; CA 2076174 A1 19930217; CA 2076174 C 19951121; DE 69228724 D1 19990429; DE 69228724 T2 19990819; ES 2129031 T3 19990601; KR 0163608 B1 19990501; KR 930004760 A 19930323; US 5214952 A 19930601
DOCDB simple family (application)
EP 92113931 A 19920814; CA 2076174 A 19920814; DE 69228724 T 19920814; ES 92113931 T 19920814; KR 920014639 A 19920814; US 74569791 A 19910816