EP 0537051 B1 19941207 - Installation for the pumping of gas with pumping speed regulation.
Title (en)
Installation for the pumping of gas with pumping speed regulation.
Title (de)
Anlage zum Pumpen von Gasen mit Pumpengeschwindigkeitsregelung.
Title (fr)
Installation de pompage de gaz avec régulation de la vitesse de pompage.
Publication
Application
Priority
FR 9112310 A 19911007
Abstract (en)
[origin: EP0537051A1] A machine of the ROOTS type is connected, via a suction inlet part (1), to an enclosure to be evacuated and, by a delivery outlet part (2), to a primary pump (8). A bellows (9) is located transversely in the intake part (1), one (10) of its ends being fixed, in a sealed fashion, into the wall, and the other end (11) being closed and capable of moving, so that the bellows (9) forms a member for regulating the passage cross-section of the gas in the intake part (1). The movable end (11) of the bellows is subjected, on its outer side, to the pressure prevailing in the intake part (1) and, on its inner side, by means of a rod (20) passing through the wall, and through a passageway (17) to the pressure prevailing in the delivery outlet part (2). <??>The invention applies to machines of the ROOTS type, especially for automatically regulating the pumping speed to match the latter to the flow rate of the corresponding primary pump. <IMAGE>
IPC 1-7
IPC 8 full level
F04B 37/14 (2006.01); F04B 41/06 (2006.01); F04B 49/22 (2006.01); F04C 18/18 (2006.01); F04C 28/10 (2006.01); F04C 28/24 (2006.01); F04C 28/26 (2006.01); F04C 29/12 (2006.01)
CPC (source: EP US)
F04B 37/14 (2013.01 - EP US); F04B 41/06 (2013.01 - EP US); F04B 49/225 (2013.01 - EP US); F04C 28/24 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
EP 0537051 A1 19930414; EP 0537051 B1 19941207; AT E115242 T1 19941215; DE 69200828 D1 19950119; DE 69200828 T2 19950413; DK 0537051 T3 19950306; FR 2682164 A1 19930409; FR 2682164 B1 19950120; JP 3251983 B2 20020128; JP H05231371 A 19930907; US 5244353 A 19930914
DOCDB simple family (application)
EP 92402669 A 19920929; AT 92402669 T 19920929; DE 69200828 T 19920929; DK 92402669 T 19920929; FR 9112310 A 19911007; JP 26865192 A 19921007; US 95624392 A 19921005