EP 0539097 B1 19941130 - Low-contamination impact tool for breaking silicon.
Title (en)
Low-contamination impact tool for breaking silicon.
Title (de)
Schlagwerkzeug mit geringer Verunreinigung zum Brechen von Silizium.
Title (fr)
Outil de percussion à faible contamination pour casser le silicium.
Publication
Application
Priority
US 78147691 A 19911023
Abstract (en)
[origin: EP0539097A1] The present invention is a low-contamination impact tool especially useful for the breaking of semiconductor-grade silicon into pieces. The low-contamination impact tool comprises a core forming a handle portion (1) and a head portion (2), the head portion (2) contacting a tungsten carbide alloy striking element (4). The core is encapsulated in a synthetic resin material (3). The preferred synthetic resin is urethane. <IMAGE>
IPC 1-7
IPC 8 full level
B25D 1/02 (2006.01); H01L 21/301 (2006.01)
CPC (source: EP KR)
B25D 1/02 (2013.01 - EP); B25D 9/00 (2013.01 - KR); B25D 2222/51 (2013.01 - EP); B25D 2222/69 (2013.01 - EP)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0539097 A1 19930428; EP 0539097 B1 19941130; CA 2081127 A1 19930424; DE 69200756 D1 19950112; DE 69200756 T2 19950406; JP H06218677 A 19940809; KR 100207163 B1 19990715; KR 930007591 A 19930520
DOCDB simple family (application)
EP 92309423 A 19921015; CA 2081127 A 19921022; DE 69200756 T 19921015; JP 28593592 A 19921023; KR 920019583 A 19921023