Global Patent Index - EP 0545064 B1

EP 0545064 B1 20010808 - Device for filtering charged particles, energy filter and analyser using such an energy filter

Title (en)

Device for filtering charged particles, energy filter and analyser using such an energy filter

Title (de)

Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter

Title (fr)

Dispositif pour le filtrage de particules chargées, filtre en energie et analyseur utilisant un tel filtre en énergie

Publication

EP 0545064 B1 20010808 (DE)

Application

EP 92118282 A 19921026

Priority

CH 353691 A 19911202

Abstract (en)

[origin: EP0545064A2] On an energy filter, ions on the inlet side are deflected by means of a first electrostatic field between electrodes (3a', 3b'), passed through a space (15) which is free of field and enter through a screen (11) a further electrostatic deflection field between electrodes (7a', 3b'). The axes (AE, AA) of the beam inlet and outlet are aligned and are offset with respect to the rotation axis (A'Z) of the cylinder forming the outermost electrode (7a'). <IMAGE>

IPC 1-7

H01J 49/48; H01J 49/14; H01J 27/20

IPC 8 full level

H01J 49/22 (2006.01); H01J 27/20 (2006.01); H01J 49/14 (2006.01); H01J 49/48 (2006.01)

CPC (source: EP US)

H01J 27/20 (2013.01 - EP US); H01J 49/14 (2013.01 - EP US); H01J 49/482 (2013.01 - EP US); H01J 49/484 (2013.01 - EP US)

Citation (examination)

Designated contracting state (EPC)

CH DE FR GB LI

DOCDB simple family (publication)

EP 0545064 A2 19930609; EP 0545064 A3 19930804; EP 0545064 B1 20010808; DE 59209914 D1 20010913; JP 3435179 B2 20030811; JP H05251036 A 19930928; US 5365064 A 19941115

DOCDB simple family (application)

EP 92118282 A 19921026; DE 59209914 T 19921026; JP 32333892 A 19921202; US 98339892 A 19921130