EP 0556177 A1 19930825 - TOP COAT FOR ACID CATALYZED RESISTS.
Title (en)
TOP COAT FOR ACID CATALYZED RESISTS.
Title (de)
ÜBERZUG FÜR SÄURE-KATALYSIERTEN PHOTOLACK.
Title (fr)
REVETEMENT SUPERFICIEL POUR VERNIS A MASQUER CATALYSES PAR ACIDE.
Publication
Application
Priority
US 58727390 A 19900918
Abstract (en)
[origin: WO9205474A1] A protective material for use as an overcoating film for acid catalyzed resist compositions comprising a polymeric film forming compound, the films of which are impermeable to vapors of organic and inorganic bases.
Abstract (fr)
Matériau protecteur destiné à être utilisé en tant que couche de revêtement pour des compositions de vernis à masquer catalysés par acide comprenant un composé polymère filmogène dont les couches sont imperméables aux vapeurs de bases organiques et inorganiques.
IPC 1-7
IPC 8 full level
G03F 7/039 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP)
G03F 7/092 (2013.01)
Citation (search report)
See references of WO 9205474A1
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
WO 9205474 A1 19920402; CA 2090039 A1 19920319; EP 0556177 A1 19930825; JP H05507154 A 19931014
DOCDB simple family (application)
US 9007618 W 19901221; CA 2090039 A 19901221; EP 91906782 A 19901221; JP 50710691 A 19901221