EP 0576791 A1 19940105 - Multi-zone illuminator with embedded process control sensors.
Title (en)
Multi-zone illuminator with embedded process control sensors.
Title (de)
Mehrzonale Beleuchtungseinrichtung mit versenkten Fühlern für Kontrolle des Verfahrens.
Title (fr)
Illuminateur multi-zone avec senseurs integrés de contrÔle du procédé.
Publication
Application
Priority
US 87044692 A 19920416
Abstract (en)
A multi-zone illuminator for processing semiconductor wafers is described which comprises a plurality of source lamps and dummy lamps embedded in the reflector side of a lamp housing. The source lamps are arranged in a plurality of concentric circular zones. The illuminator also comprises plurality of light pipes for receiving multi-point temperature sensors to measure the semiconductor wafer temperature and its distribution uniformity. A gold-plated reflector plate is attached to the bottom side of the lamp housing for reflecting and directing optical energy toward the wafer surface. The distance between the reflector plate and the wafer and the lamps and the wafer may be adjusted with the use of a spacial elevator and adaptor assembly. The multi-zone illuminator of this invention allows uniform wafer heating during both transient and steady-state wafer heating cycles. Other devices, systems and methods are also disclosed. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/26 (2006.01); G01J 5/00 (2006.01); H01L 21/00 (2006.01); H01L 21/324 (2006.01)
CPC (source: EP KR US)
H01L 21/26 (2013.01 - KR); H01L 21/67115 (2013.01 - EP US)
Citation (search report)
- [A] EP 0468874 A2 19920129 - SUMITOMO ELECTRIC INDUSTRIES [JP]
- [A] PATENT ABSTRACTS OF JAPAN vol. 011, no. 190 (E-517)18 June 1987 & JP-A-62 020 308 ( HITACHI LTD )
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
US 5268989 A 19931207; DE 69322697 D1 19990204; DE 69322697 T2 19990722; EP 0576791 A1 19940105; EP 0576791 B1 19981223; JP 3400486 B2 20030428; JP H06267879 A 19940922; KR 100295169 B1 20010917; KR 940006190 A 19940323; TW 251389 B 19950711; US 5367606 A 19941122
DOCDB simple family (application)
US 87044692 A 19920416; DE 69322697 T 19930401; EP 93105404 A 19930401; JP 8884093 A 19930415; KR 930006277 A 19930415; TW 82107855 A 19930924; US 5659993 A 19930810