EP 0605421 A1 19940713 - LOW DIELECTRIC CONSTANT SUBSTRATE AND METHOD OF MAKING.
Title (en)
LOW DIELECTRIC CONSTANT SUBSTRATE AND METHOD OF MAKING.
Title (de)
SUBSTRAT MIT NIEDRIGER DIELEKTRISCHER KONSTANTE UND VERFAHREN ZUR HERSTELLUNG.
Title (fr)
SUBSTRAT A FAIBLE CONSTANTE DIELECTRIQUE ET PROCEDE DE FABRICATION.
Publication
Application
Priority
- US 9109751 W 19911227
- US 76572991 A 19910926
Abstract (en)
[origin: WO9306053A1] A low dielectric constant substrate which includes ceramic particles uniformly coated with a borosilicate glass. The substrate preferably has a dielectric constant of about 4 or less. There is also disclosed a method of making the low dielectric constant substrate which includes as an important element therein of coating the ceramic particles with the borosilicate glass by a sol-gel process.
Abstract (fr)
Substrat à faible constante diélectrique comprenant des particules céramiques enrobées de manière uniforme d'un verre de borosilicate. Le substrat présente de préférence une constante diélectrique inférieure ou égale à 4 environ. On décrit également un procédé de fabrication du substrat à faible constante diélectrique dont un des aspects principaux consiste à enrober des particules céramiques du verre de borosilicate selon un procédé sol-gel.
IPC 1-7
IPC 8 full level
C04B 41/87 (2006.01); C03C 14/00 (2006.01); H01L 23/15 (2006.01); H05K 1/03 (2006.01)
CPC (source: EP)
C03C 14/002 (2013.01); C03C 14/004 (2013.01); H01L 23/15 (2013.01); H05K 1/0306 (2013.01); C03C 2214/02 (2013.01); C03C 2214/04 (2013.01); C03C 2214/06 (2013.01); C03C 2214/32 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/09701 (2013.01)
Citation (search report)
See references of WO 9306053A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9306053 A1 19930401; EP 0605421 A1 19940713; JP H07108832 B2 19951122; JP H07502245 A 19950309
DOCDB simple family (application)
US 9109751 W 19911227; EP 92906259 A 19911227; JP 50616792 A 19911227