EP 0606648 A3 19950125 - Semiconductor manufacturing apparatus and method of manufacturing semiconductor device.
Title (en)
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device.
Title (de)
Vorrichtung zur Herstellung von Halbleitern und Verfahren zur Herstellung von Halbleitereinrichtungen.
Title (fr)
Appareil pour produire des semi-conducteurs et procédé pour produire des dispositifs semi-conducteurs.
Publication
Application
Priority
JP 2173993 A 19930115
Abstract (en)
[origin: EP0606648A2] In a semiconductor manufacturing apparatus, a cleaner (2) is inserted in a space defined between an upper mold (1) and a lower mold (3), which are incorporated in a mold unit. The cleaner (2) has an ultraviolet-ray supply unit (26, 27), an ozone supply unit (28), an ozone collecting unit (29), and a brush. Dirt on the surfaces of the upper and lower molds is decomposed and removed by radiating ultraviolet rays in the atmosphere of heated ozone. <IMAGE>
IPC 1-7
IPC 8 full level
H01L 21/56 (2006.01); B08B 7/00 (2006.01); B29C 33/72 (2006.01); H01L 21/00 (2006.01)
CPC (source: EP)
B08B 7/0057 (2013.01); B29C 33/72 (2013.01); H01L 21/67126 (2013.01)
Citation (search report)
- [PX] GB 2261548 A 19930519 - MOTOROLA INC [US]
- [DY] PATENT ABSTRACTS OF JAPAN
- [Y] PATENT ABSTRACTS OF JAPAN
- [A] PATENT ABSTRACTS OF JAPAN
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0606648 A2 19940720; EP 0606648 A3 19950125; JP H06216175 A 19940805
DOCDB simple family (application)
EP 93121022 A 19931228; JP 2173993 A 19930115