EP 0610666 B1 19980415 - Turbomolecular pump
Title (en)
Turbomolecular pump
Title (de)
Turbomolekularpumpe
Title (fr)
Pompe turbomoléculaire
Publication
Application
Priority
- JP 284393 A 19930111
- JP 284593 A 19930111
Abstract (en)
[origin: EP0610666A1] The present invention refers to a turbomolecular pump (turbo-pump) (1000) having a cold trap panel (414) wherein the trap panel contains an annular panel (416), a disk-shaped panel (420) and a supporting frame (418) that connects the annular panel (416) to the disk-shaped panel (420) such that these two panels are coaxially positioned relative to one another. The trap panel (414) is positioned within an inlet (410) to the turbo-pump (1000) and coaxially aligned with a main axis of an impeller shaft (404) thereof. Additionally, a heater (1002) is located proximate said trap panel (414) such that, when energized, the heater (1002) relatively quickly vaporizes any molecules adsorbed by the trap panel (414). <IMAGE>
IPC 1-7
IPC 8 full level
F04B 37/06 (2006.01); F04D 19/04 (2006.01); F04D 29/58 (2006.01)
CPC (source: EP)
F04B 37/06 (2013.01); F04D 19/046 (2013.01); F04D 29/584 (2013.01)
Citation (examination)
DE 3512614 A1 19861016 - LEYBOLD HERAEUS GMBH & CO KG [DE]
Designated contracting state (EPC)
DE FR IT NL
DOCDB simple family (publication)
EP 0610666 A1 19940817; EP 0610666 B1 19980415; DE 69409555 D1 19980520; DE 69409555 T2 19981203
DOCDB simple family (application)
EP 94100312 A 19940111; DE 69409555 T 19940111