Title (en)

ION-OPTICAL SYSTEM FOR GAS DISCHARGE ION SOURCE

Title (de)

IONENOPTIKSYSTEM FÜR EINE GASENTLADUNGSIONENQUELLE

Title (fr)

SYSTEME D'OPTIQUE IONIQUE POUR SOURCE D'IONS A DECHARGE DANS UN GAZ

Publication

EP 0611482 B1 19970423 (FR)

Application

EP 93919396 A 19930824

Priority

• FR 9300823 W 19930824
• RU 9200163 W 19920824
• US 21167694 A 19940412

IPC 1-7

H01J 27/02; F03H 1/00

IPC 8 full level

F03H 1/00 (2006.01); H01J 27/02 (2006.01)

CPC (source: EP)

H01J 27/024 (2013.01)

Designated contracting state (EPC)

DE FR GB IT

DOCDB simple family (publication)

EP 0611482 A1 19940824; EP 0611482 B1 19970423

DOCDB simple family (application)

EP 93919396 A 19930824