EP 0619484 A1 19941012 - Optical illumination and inspection system for wafer and solar cell defects.
Title (en)
Optical illumination and inspection system for wafer and solar cell defects.
Title (de)
Vorrichtung zur optischen Beleuchtung und Untersuchung von Defekten in Halbleiterscheiben und Solarzellen.
Title (fr)
Système d'inspection et d'illumination optique de défauts d'une plaquette de semi-conducteur ou d'une cellule solaire.
Publication
Application
Priority
US 4289093 A 19930405
Abstract (en)
The system has a collimated light source which projects light which is passed through a long pass filter. The filtered collimated light is projected onto the reflective surface of a panel that contains surface irregularities in the same order as the wavelength of the filtered, collimated light. The light is diffused by the panel surface and reflected onto the crystalline substrate at a plurality of various angles. The light passes through the crystalline substrate and is reflected into the path of the field of view of the video camera and forms an object image from which a real image is created and may be viewed on a control monitor. Cracks in the solar cell silicon layer or glass covers can be observed on the control monitor, and printed by a video graphics printer or stored via a VCR for permanent documentation purposes.
IPC 1-7
IPC 8 full level
G01N 21/88 (2006.01); G01N 21/956 (2006.01); H01L 21/66 (2006.01); G01N 21/95 (2006.01)
CPC (source: EP US)
G01N 21/8806 (2013.01 - EP US); G01N 21/9501 (2013.01 - EP US); G01N 21/9505 (2013.01 - EP US); Y10S 136/29 (2013.01 - EP US)
Citation (search report)
- [XA] US 4501966 A 19850226 - FORMAN STEVEN E [US], et al
- [X] FR 2641866 A1 19900720 - AEROSPATIALE [FR]
- [PXPA] FR 2686697 A1 19930730 - AEROSPATIALE [FR]
Designated contracting state (EPC)
DE FR GB IT
DOCDB simple family (publication)
US 5334844 A 19940802; CA 2118743 A1 19941006; DE 69414630 D1 19981224; DE 69414630 T2 19990617; EP 0619484 A1 19941012; EP 0619484 B1 19981118; JP H06308042 A 19941104
DOCDB simple family (application)
US 4289093 A 19930405; CA 2118743 A 19940310; DE 69414630 T 19940405; EP 94302398 A 19940405; JP 6719394 A 19940405