EP 0620291 B1 19960904 - High purity bulk chemical delivery system
Title (en)
High purity bulk chemical delivery system
Title (de)
Einrichtung zum Beschicken mit hochreinen chemischen Werkstoffen
Title (fr)
Dispositif pour la distribution de produits chimiques de haute pureté
Publication
Application
Priority
US 4904293 A 19930416
Abstract (en)
[origin: EP0620291A1] An apparatus and method are described for delivering hygroscopic, corrosive chemicals such as hydrogen chloride from a source such as a tube trailer to a use point such as a semiconductor fabrication tool minimizing infiltration of moisture, and entrainment of particulates, while still reducing moisture contents below 100 parts per billion and achieving appropriate pressure drops without two phase flow. The apparatus comprising: (a) a delivery conduit (12) for connection to said source of supply (10) of said chemical and to said use point (34); (b) a heated dehydrator (18) connected in said delivery conduit for removing moisture from said chemical as it passes through said conduit; (c) at least one pressure regulator (22) connected in said delivery conduit to reduce the pressure from said elevated pressure source of supply to said lower pressure use point; (d) at least one means (20) to heat said chemical as it passes through said at least one pressure regulator; and (e) a vacuum means (16) for evacuating said delivery conduit in an operation of connecting said delivery conduit to said source of supply and/or said use point. <IMAGE>
IPC 1-7
IPC 8 full level
C23C 16/44 (2006.01)
CPC (source: EP US)
C23C 16/4401 (2013.01 - EP US); C23C 16/4402 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE DE ES FR GB IE IT NL SE
DOCDB simple family (publication)
EP 0620291 A1 19941019; EP 0620291 B1 19960904; AT E142282 T1 19960915; DE 69400458 D1 19961010; DE 69400458 T2 19970130; ES 2094582 T3 19970116; US 5359787 A 19941101; US 5539998 A 19960730
DOCDB simple family (application)
EP 94105564 A 19940411; AT 94105564 T 19940411; DE 69400458 T 19940411; ES 94105564 T 19940411; US 30398694 A 19940909; US 4904293 A 19930416