EP 0620582 B1 19960828 - Liquid metal ion source for producing cobalt ion beams
Title (en)
Liquid metal ion source for producing cobalt ion beams
Title (de)
Flüssigmetall-Ionenquelle zur Erzeugung von Kobalt-Ionenstrahlen
Title (fr)
Source de ions à métal liquide pour la production des rayons de ions de cobalt
Publication
Application
Priority
DE 4312028 A 19930413
Abstract (en)
[origin: EP0620582A1] The invention relates to a liquid metal ion source for producing cobalt ion beams, in particular the source material, which wets the emitter, of an ion source of this kind. The invention comprises liquid metal ion sources, whose emitter is wetted with a defined alloy of cobalt and one or more elements from the group of rare earths as source material. With liquid metal ion sources, equipped in this manner, it is possible to achieve over a long period of time a stable ion stream which consists to a sufficient extent of cobalt ions. In cooperation with the low melting point, the components of the alloy have the result that no chemical reactions with the emitter and heater material occur.
IPC 1-7
IPC 8 full level
H01J 27/22 (2006.01); H01J 37/08 (2006.01)
CPC (source: EP)
H01J 27/22 (2013.01); H01J 2237/0805 (2013.01)
Designated contracting state (EPC)
DE GB
DOCDB simple family (publication)
EP 0620582 A1 19941019; EP 0620582 B1 19960828; DE 4312028 A1 19941020; DE 59400534 D1 19961002
DOCDB simple family (application)
EP 94105227 A 19940402; DE 4312028 A 19930413; DE 59400534 T 19940402