EP 0625401 B1 19981021 - Laser system and use of the laser system
Title (en)
Laser system and use of the laser system
Title (de)
Lasersystem und Verwendung des Lasersystems
Title (fr)
Système à laser et utilisation du système à laser
Publication
Application
Priority
JP 11542793 A 19930419
Abstract (en)
[origin: EP0625401A2] A laser system comprising a laser oscillator emitting laser beam, and an attenuator disposed on a light path of the laser beam and damping intensity of the laser beam in which intensity of the laser beam can be controlled so as to maintain a required value after the attenuator. <IMAGE>
IPC 1-7
IPC 8 full level
H01S 3/10 (2006.01); C23C 14/28 (2006.01); H01L 21/268 (2006.01)
CPC (source: EP US)
B23K 26/702 (2015.10 - EP US); C23C 14/28 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL
DOCDB simple family (publication)
EP 0625401 A2 19941123; EP 0625401 A3 19950315; EP 0625401 B1 19981021; DE 69414028 D1 19981126; DE 69414028 T2 19990610; JP H06302897 A 19941028; US 5544182 A 19960806
DOCDB simple family (application)
EP 94400854 A 19940419; DE 69414028 T 19940419; JP 11542793 A 19930419; US 22971694 A 19940419