EP 0625568 A1 19941123 - Cleaning solution for apparatuses contacted with quinone diazide photosensitizers and cleaning method using the same.

Title (en)

Cleaning solution for apparatuses contacted with quinone diazide photosensitizers and cleaning method using the same.

Title (de)

Reinigungslösung für Vorrichtungen, die zur Herstellung von Chinondiazid-Photosensibilatoren verwendet wurden und Reinigungsverfahren unter Einsatz dieser Lösung.

Title (fr)

Solution de nettoyage pour des appareils qui sont en contact avec des quinones diazides photosensibilisantes et méthode de nettoyage utilisant cette solution.

Publication

EP 0625568 A1 19941123 (EN)

Application

EP 94107626 A 19940517

Priority

JP 11571393 A 19930518
JP 21441993 A 19930830
JP 22134093 A 19930906

Abstract (en)

The present invention provides a cleaning solution excellent in cleaning efficiency which is used for cleaning apparatuses for producing photosensitive agents, apparatuses for preparing positive type resist solutions or spin coater line pipings. The invention further provides a practically useful cleaning method. The cleaning solution is characterized by containing N-methylpyrrolidone and the cleaning method is carried out using the cleaning solution.

IPC 1-7

C11D 7/32; C11D 7/50

IPC 8 full level

C11D 3/00 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 7/26 (2006.01); C11D 7/28 (2006.01)

CPC (source: EP)

C11D 3/0063 (2013.01); C11D 7/3281 (2013.01); C11D 7/5013 (2013.01); C11D 7/264 (2013.01); C11D 7/28 (2013.01)

Citation (search report)

[Y] EP 0021149 A1 19810107 - IBM [US]
[A] GB 2084613 A 19820415 - IHRINGER ERNEST
[A] GB 2191501 A 19871216 - PROTECTIVE RESEARCH IND LIMITE
[A] EP 0103808 A1 19840328 - BAKER CHEM CO J T [US]
[X] DATABASE WPI Week 8601, Derwent World Patents Index; AN 86-005246
[Y] DATABASE WPI Week 8712, Derwent World Patents Index; AN 87-084322
[A] DATABASE WPI Week 9015, Derwent World Patents Index; AN 90-112013

Designated contracting state (EPC)

BE DE FR GB IT NL SE

DOCDB simple family (publication)

EP 0625568 A1 19941123; CA 2123193 A1 19941119

DOCDB simple family (application)

EP 94107626 A 19940517; CA 2123193 A 19940509