EP 0626516 B1 19970604 - Lubricant-free vacuum pump arrangement
Title (en)
Lubricant-free vacuum pump arrangement
Title (de)
Schmiermittelfreie Vakuum-Pumpeinrichtung
Title (fr)
Dispositif de pompe à vide sans lubrifiant
Publication
Application
Priority
- DE 4320963 A 19930624
- DE 9305554 U 19930415
Abstract (en)
[origin: US5387090A] A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).
IPC 1-7
F04B 25/00; F04B 39/04; F04B 23/10; F04D 19/04; F04D 25/16; F04B 23/06
IPC 8 full level
F04B 23/06 (2006.01); F04B 25/00 (2006.01); F04B 37/00 (2006.01); F04B 39/04 (2006.01); F04B 45/04 (2006.01); F04D 19/04 (2006.01); F04D 25/16 (2006.01)
CPC (source: EP US)
F04B 23/06 (2013.01 - EP US); F04B 25/005 (2013.01 - EP US); F04B 39/048 (2013.01 - EP US); F04D 19/042 (2013.01 - EP US); F04D 19/046 (2013.01 - EP US); F04D 25/16 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
US 5387090 A 19950207; EP 0626516 A1 19941130; EP 0626516 B1 19970604; JP 2882748 B2 19990412; JP H06299962 A 19941025; US 5584669 A 19961217
DOCDB simple family (application)
US 22616594 A 19940411; EP 94103685 A 19940310; JP 7606094 A 19940414; US 37755195 A 19950124