EP 0631210 A1 19941228 - Method and apparatus for controlling temperature.
Title (en)
Method and apparatus for controlling temperature.
Title (de)
Methode und Apparat zur Temperaturregelung.
Title (fr)
Méthode et appareil de contrÔle de la température.
Publication
Application
Priority
JP 14901093 A 19930621
Abstract (en)
A method of controlling temperature inside a chamber according to a temperature profile which includes a plurality of segments, each of which has an increasing or decreasing temperature period and a subsequent constant temperature period. An operator only needs to inputting a target temperature, a first period, and a second period, one time each, as parameters, for each sub-input-state which is part of an input-state and which is provided for each segment, so that the temperature is varied to match the target temperature for the first period and that the target temperature is maintained for the second period, for each segment. <IMAGE>
IPC 1-7
IPC 8 full level
G05B 19/07 (2006.01); G05D 23/19 (2006.01); G05D 23/20 (2006.01); H05B 3/00 (2006.01)
CPC (source: EP US)
G05B 19/075 (2013.01 - EP US); G05D 23/1934 (2013.01 - EP US); G05D 23/20 (2013.01 - EP US)
Citation (search report)
- [Y] EP 0110408 A2 19840613 - OMRON TATEISI ELECTRONICS CO [JP]
- [Y] US 4409662 A 19831011 - RAO PRABHAKAR P [US]
- [A] GB 1589563 A 19810513 - PLANER PRODUCTS LTD
Designated contracting state (EPC)
CH DE FR GB LI
DOCDB simple family (publication)
EP 0631210 A1 19941228; EP 0631210 B1 19980204; DE 69316884 D1 19980312; DE 69316884 T2 19980528; JP H075934 A 19950110; US 5431339 A 19950711
DOCDB simple family (application)
EP 93119309 A 19931130; DE 69316884 T 19931130; JP 14901093 A 19930621; US 15869693 A 19931129