Title (en)

PROCESS FOR ACCELERTING ELECTRICALLY CHARGED PARTICLES

Title (de)

VERFAHREN ZUM BESCHLEUNIGEN ELEKTRISCH GELADENER TEILCHEN

Title (fr)

PROCEDE D'ACCELERATION DE PARTICULES CHARGEES ELECTRIQUEMENT

Publication

EP 0631712 B1 19980520 (DE)

Application

EP 93906431 A 19930318

Priority

• DE 9300253 W 19930318
• DE 4208764 A 19920319

Abstract (en)

[origin: WO9319572A1] A process for accelerating electrically charged particles and a particle accelerator for applying the process are diclosed. The beam thus generated has a high degree of intensity and convergence and is suitable for uniformly depositing a material on a substrate. Similarly, it is useful for generating light of different spectral regions.

IPC 1-7

H05H 1/22; H05H 1/06; H05H 5/00

IPC 8 full level

H01J 37/077 (2006.01); H05H 1/06 (2006.01); H05H 1/22 (2006.01); H05H 1/24 (2006.01); H05H 1/54 (2006.01); H05H 5/00 (2006.01)

CPC (source: EP US)

H05H 1/06 (2013.01 - EP US); H05H 5/00 (2013.01 - EP US)

Designated contracting state (EPC)

CH DE FR GB IT LI NL SE

DOCDB simple family (publication)

WO 9319572 A1 19930930; DE 4208764 A1 19930930; DE 4208764 C2 19940224; DE 59308583 D1 19980625; EP 0631712 A1 19950104; EP 0631712 B1 19980520; JP 2831468 B2 19981202; JP H07501654 A 19950216; US 5576593 A 19961119

DOCDB simple family (application)

DE 9300253 W 19930318; DE 4208764 A 19920319; DE 59308583 T 19930318; EP 93906431 A 19930318; JP 51616993 A 19930318; US 30107894 A 19940906