EP 0635141 A1 19950125 - METHOD OF MANUFACTURING A MICROSYSTEM AND OF PRODUCING A MICROSYSTEM LASER FROM IT.

Title (en)

METHOD OF MANUFACTURING A MICROSYSTEM AND OF PRODUCING A MICROSYSTEM LASER FROM IT.

Title (de)

VERFAHREN ZUR HERSTELLUNG EINES MIKROSYSTEMS UND DARAUS BILDUNG EINES MIKROSYSTEMLASERS.

Title (fr)

PROCEDE DE FABRICATION DE MICROSYSTEMES ET FORMATION D'UN LASER A BASE D'UN TEL MICROSYSTEME.

Publication

EP 0635141 A1 19950125 (DE)

Application

EP 93908902 A 19930403

Priority

DE 4211899 A 19920409
EP 9300830 W 19930403

Abstract (en)

[origin: WO9321551A1] The invention concerns a method of manufacturing a microsystem and of producing from it a microsystem laser designed preferably as a vertical structural element formed by contacting wafers carrying different functional system elements so that (a) this system includes heterogeneous functions such as actuators, optics, sensors, cooling system, micro-mechanics and electronics and (b) the wafers carrying these functions permit relatively homogeneous processing of the extremely similar functions integrated on each wafer so that the complexity of the system is only produced by the vertical disposition of these functions.

IPC 1-7

G02B 6/42; H01S 3/025; H01L 25/16

IPC 8 full level

G02B 6/42 (2006.01); G02B 6/43 (2006.01); H01L 25/16 (2006.01); H01L 27/15 (2006.01); H01S 3/02 (2006.01); H01S 5/18 (2021.01); H01S 5/42 (2006.01); H01S 3/0941 (2006.01); H01S 5/024 (2006.01); H01S 5/40 (2006.01)

CPC (source: EP US)

G02B 6/43 (2013.01 - EP US); H01L 25/167 (2013.01 - EP US); H01S 5/02325 (2021.01 - EP US); H01S 5/18 (2013.01 - EP US); H01S 5/42 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US); H01S 3/025 (2013.01 - EP US); H01S 3/0604 (2013.01 - EP US); H01S 3/0941 (2013.01 - EP US); H01S 5/005 (2013.01 - EP US); H01S 5/0071 (2013.01 - EP US); H01S 5/0687 (2013.01 - EP US); H01S 5/4025 (2013.01 - EP US)

C-Set (source: EP US)

H01L 2924/0002 + H01L 2924/00

Citation (search report)

See references of WO 9321551A1

Designated contracting state (EPC)

AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE

DOCDB simple family (publication)

WO 9321551 A1 19931028; DE 4211899 A1 19931021; DE 4211899 C2 19980716; EP 0635141 A1 19950125; JP H07505728 A 19950622; US 5637885 A 19970610

DOCDB simple family (application)

EP 9300830 W 19930403; DE 4211899 A 19920409; EP 93908902 A 19930403; JP 51794593 A 19930403; US 42079195 A 19950407