EP 0635142 A1 19950125 - LASER SYSTEM WITH MIRRORS MOVED BY MICRO-ENGINEERING TECHNIQUES.
Title (en)
LASER SYSTEM WITH MIRRORS MOVED BY MICRO-ENGINEERING TECHNIQUES.
Title (de)
LASERSYSTEM MIT MIKROMECHANISCH BEWEGTEN SPIEGEL.
Title (fr)
DISPOSITIF LASER AVEC MIROIRS DEPLACES MICROMECANIQUEMENT.
Publication
Application
Priority
- DE 4211898 A 19920409
- DE 4215797 A 19920513
- EP 9300829 W 19930403
Abstract (en)
[origin: WO9321553A1] The invention concerns a laser system with one or more actively controlled mirrors which are manufactured using micro-engineering techniques and are equipped with a manipulation device enabling small laser mirrors to be oscillated rapidly. These mirrors are designed in such a way that they can be manufactured cheaply and in large numbers. Embodiments of the invention are described, and illustrated in the drawings.
IPC 1-7
IPC 8 full level
G02B 1/10 (2006.01); G02B 5/08 (2006.01); G02B 26/00 (2006.01); G02B 26/08 (2006.01); H01S 3/105 (2006.01); H01S 3/121 (2006.01); H01S 5/00 (2006.01); H01S 5/14 (2006.01); H01S 3/02 (2006.01); H01S 3/0941 (2006.01); H01S 5/40 (2006.01); H01S 5/42 (2006.01)
CPC (source: EP US)
G02B 1/10 (2013.01 - EP); G02B 1/11 (2013.01 - US); G02B 5/0833 (2013.01 - EP); G02B 5/0858 (2013.01 - EP); G02B 26/002 (2013.01 - EP); G02B 26/0833 (2013.01 - EP); G02B 26/0841 (2013.01 - EP); G02B 26/085 (2013.01 - EP); G02B 26/0858 (2013.01 - EP); H01S 3/105 (2013.01 - EP); H01S 3/121 (2013.01 - EP); H01S 5/14 (2013.01 - EP); H01S 3/025 (2013.01 - EP); H01S 3/0602 (2013.01 - EP); H01S 3/09415 (2013.01 - EP); H01S 5/02326 (2021.01 - EP); H01S 5/4062 (2013.01 - EP); H01S 5/42 (2013.01 - EP)
Citation (search report)
See references of WO 9321553A1
Designated contracting state (EPC)
AT BE CH DE DK ES FR GB GR IE IT LI LU MC NL PT SE
DOCDB simple family (publication)
WO 9321553 A1 19931028; EP 0635142 A1 19950125; JP H08500468 A 19960116
DOCDB simple family (application)
EP 9300829 W 19930403; EP 93911443 A 19930403; JP 51794493 A 19930403