EP 0637046 B1 19980401 - Thermoionic emissive cathode method of fabricating the same thermoionic emissive cathode and electron beam apparatus
Title (en)
Thermoionic emissive cathode method of fabricating the same thermoionic emissive cathode and electron beam apparatus
Title (de)
Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät
Title (fr)
Cathode à émission thermoionique, procédé de fabrication d'un telle cathode à émission thermoionique et appareil à faisceau d'électrons
Publication
Application
Priority
JP 18790293 A 19930729
Abstract (en)
[origin: EP0637046A1] A thermoionic emissive cathode formed from a sintered mixture of at least one high melting point refractory and ion sintered durable substance selected from a group consisting of a metal having melting point equal to or higher than 2400 DEG C, an alloy containing the metal as a main constituent thereof, a carbide of the metal, a boride of the metal, zirconium carbide and zirconium boride and at least one electron emissive substance having low work function, selected from borides or oxides of a metal selected from a group consisting of lanthanum, yttrium, cerium and cesium, said sintered mixture being prepared by heating and pressing, is used in an electron beam apparatus. In this electron beam apparatus, it is possible to stably irradiate electron beam with heating temperature of the thermoionic emissive cathode being about 1500 DEG C to 1800 DEG C under a vacuum pressure in the range of 10<-><2> to 10<-><3> Pa. <IMAGE>
IPC 1-7
IPC 8 full level
H01J 1/14 (2006.01)
CPC (source: EP)
H01J 1/14 (2013.01); H01J 2237/06308 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0637046 A1 19950201; EP 0637046 B1 19980401; DE 69409306 D1 19980507; DE 69409306 T2 19980730
DOCDB simple family (application)
EP 94111883 A 19940729; DE 69409306 T 19940729