EP 0637375 A1 19950208 - ACOUSTO-OPTIC TUNABLE FILTER-BASED SURFACE SCANNING SYSTEM AND PROCESS.
Title (en)
ACOUSTO-OPTIC TUNABLE FILTER-BASED SURFACE SCANNING SYSTEM AND PROCESS.
Title (de)
OBERFLÄCHENABTASTSYSTEM UND VERFAHREN AUF DER BASIS AKUSTO-OPTISCHER FILTER.
Title (fr)
SYSTEME ET PROCEDE DE BALAYAGE DE SURFACE AU MOYEN D'UN FILTRE ACOUSTO-OPTIQUE ACCORDABLE.
Publication
Application
Priority
- US 9303831 W 19930423
- US 87393792 A 19920424
Abstract (en)
[origin: WO9322655A1] A scanning system (10) for inspecting a surface (16) including a light source (30) which generates a beam of light (32) that is reflected, scattered or causes fluorescence at the surface to be inspected. An optical interface (14) receives the beam of light and directs it along a predetermined path extending to and from the surface. An acousto-optic tunable filter (34) tuned to pass light having a wavelength corresponding to a known optical property of a predetermined material is positioned within the path of light. A detector (42) is positioned to receive light emanating from the surface and is configured to monitor the intensity of light at each predetermined wavelength being monitored and generate a corrsponding signal. The system is preferably attached to a scan board (90) thereby enabling the system to be used in scanning a surface. The system also includes a signal processor (22) which processes the signal generated by the detector. The resulting data is displayed by an output device (26).
IPC 1-7
IPC 8 full level
G01B 11/30 (2006.01); F02K 9/96 (2006.01); G01B 11/06 (2006.01); G01N 21/17 (2006.01); G01N 21/21 (2006.01); G01N 21/31 (2006.01); G01N 21/64 (2006.01); G01N 21/88 (2006.01); G01N 21/93 (2006.01); G01N 21/94 (2006.01); G01J 3/12 (2006.01); G01N 21/59 (2006.01); G01N 21/84 (2006.01)
CPC (source: EP)
G01B 11/0625 (2013.01); G01N 21/17 (2013.01); G01N 21/314 (2013.01); G01N 21/6456 (2013.01); G01N 21/8806 (2013.01); G01N 21/94 (2013.01); G01J 3/1256 (2013.01); G01N 21/21 (2013.01); G01N 21/4738 (2013.01); G01N 21/474 (2013.01); G01N 21/5911 (2013.01); G01N 21/8422 (2013.01); G01N 21/93 (2013.01); G01N 2021/3133 (2013.01); G01N 2021/4709 (2013.01); G01N 2021/8427 (2013.01); G01N 2021/945 (2013.01)
Designated contracting state (EPC)
AT BE CH DE DK FR GB IT LI NL SE
DOCDB simple family (publication)
WO 9322655 A1 19931111; AU 4521893 A 19931129; CA 2133307 A1 19931111; EP 0637375 A1 19950208; EP 0637375 A4 19960529; JP H08500432 A 19960116
DOCDB simple family (application)
US 9303831 W 19930423; AU 4521893 A 19930423; CA 2133307 A 19930423; EP 93915111 A 19930423; JP 51939893 A 19930423