EP 0645008 A1 19950329 - ENDPOINT DETECTION TECHNIQUE USING SIGNAL SLOPE DETERMINATIONS.
Title (en)
ENDPOINT DETECTION TECHNIQUE USING SIGNAL SLOPE DETERMINATIONS.
Title (de)
TECHNIK ZUR BESTIMMUNG DES ENDPUNKTES DURCH BESTIMMUNG DER NEIGUNG DES SIGNALS.
Title (fr)
TECHNIQUE DE DETECTION DE FIN DE TRAITEMENT UTILISANT LES DETERMINATIONS DE LA PENTE DU SIGNAL.
Publication
Application
Priority
- US 9304936 W 19930524
- US 89613792 A 19920609
Abstract (en)
[origin: WO9325893A1] A predetermined stage of a changing condition is detected by monitoring a change in a signal relating to the changing condition. For example, the existence of a breakthrough that results from photoresist development, material etching, and the like, is detected by optically monitoring a semiconductor wafer, printed circuit board, and the like, that is being processed. An optimum end of the processing can then be determined in response to a breakthrough being detected, either for the purpose of monitoring the process or in order to automatically terminate the processing at that determined time. As part of the processing that determines the existence of a breakthrough, the optical signal is digitized and individual slope values calculated from groups of consecutive digital signal values.
IPC 1-7
IPC 8 full level
G01N 21/27 (2006.01); G01B 11/06 (2006.01); G01N 21/45 (2006.01); G06T 1/00 (2006.01); H01L 21/027 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR)
G01B 11/0683 (2013.01 - EP); G01N 21/88 (2013.01 - KR)
Citation (search report)
See references of WO 9325893A1
Designated contracting state (EPC)
BE DE FR GB NL
DOCDB simple family (publication)
WO 9325893 A1 19931223; EP 0645008 A1 19950329; JP 3375338 B2 20030210; JP H07507904 A 19950831; KR 950702029 A 19950517; TW 223176 B 19940501
DOCDB simple family (application)
US 9304936 W 19930524; EP 93914123 A 19930524; JP 50149994 A 19930524; KR 19940704490 A 19941209; TW 82105546 A 19930713