EP 0647356 A1 19950412 - PROCESS FOR PRODUCING A DISH CAPACITOR.

Title (en)

PROCESS FOR PRODUCING A DISH CAPACITOR.

Title (de)

HERSTELLUNGSVERFAHREN FÜR EINEN SCHÜSSELKONDENSATOR.

Title (fr)

PROCEDE DE FABRICATION D'UN CONDENSATEUR EN CUVETTE.

Publication

EP 0647356 A1 19950412 (DE)

Application

EP 93912618 A 19930624

Priority

DE 9300551 W 19930624
DE 4221431 A 19920630

Abstract (en)

[origin: WO9400874A1] According to the invention, in a dish capacitor, especially for use in stacked capacitor above bit line storage cells, a chemical mechanical polishing (CMP) process is used in producing the lower capacitor electrode (44, 46).

IPC 1-7

H01L 21/82; H01L 27/108

IPC 8 full level

H01L 21/8242 (2006.01); H01L 21/02 (2006.01); H01L 21/822 (2006.01); H01L 27/04 (2006.01); H01L 27/108 (2006.01)

CPC (source: EP KR)

H01L 21/82 (2013.01 - KR); H01L 28/91 (2013.01 - EP)

Citation (search report)

See references of WO 9400874A1

Designated contracting state (EPC)

AT DE FR GB IE IT NL

DOCDB simple family (publication)

WO 9400874 A1 19940106; DE 4221431 A1 19940105; EP 0647356 A1 19950412; JP H07508136 A 19950907; KR 950702339 A 19950619; TW 230844 B 19940921

DOCDB simple family (application)

DE 9300551 W 19930624; DE 4221431 A 19920630; EP 93912618 A 19930624; JP 50194794 A 19930624; KR 19940704838 A 19941230; TW 82104683 A 19930612