EP 0649538 A1 19950426 - ACCELERATION SENSOR.
Title (en)
ACCELERATION SENSOR.
Title (de)
BESCHLEUNIGUNGSSENSOR.
Title (fr)
DETECTEUR D'ACCELERATION.
Publication
Application
Priority
- DE 9300570 W 19930630
- DE 4222472 A 19920709
Abstract (en)
[origin: WO9401782A1] The proposal is for an acceleration sensor consisting of an upper plate (1), a central plate (2) and a lower plate (3). The sensor has a movable electrode (4) built out from the central plate (2). The assembly of the plates is simplified by the use of a closed dielectric layer (10) on the upper plate (1) and the lower plate (3) since the plates do not have to be mutually adjusted. The use of stops (17) prevents the jamming of the seismic mass (33) on the upper (1) or lower plate (3). The use of local oxidation (18) reduces the stray capacitance.
IPC 1-7
IPC 8 full level
G01P 15/08 (2006.01); G01P 15/125 (2006.01)
CPC (source: EP)
G01P 15/0802 (2013.01); G01P 15/125 (2013.01); G01P 2015/0828 (2013.01)
Citation (search report)
See references of WO 9401782A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9401782 A1 19940120; DE 4222472 A1 19940113; DE 4222472 C2 19980702; EP 0649538 A1 19950426; JP H07508835 A 19950928
DOCDB simple family (application)
DE 9300570 W 19930630; DE 4222472 A 19920709; EP 93914592 A 19930630; JP 50281894 A 19930630