EP 0652304 A1 19950510 - Film forming method and apparatus for carrying out the same.
Title (en)
Film forming method and apparatus for carrying out the same.
Title (de)
Filmherstellungsverfahren und Vorrichtung zur Durchführung desselben.
Title (fr)
Procédé pour la formation d'un film et appareillage pour la mise en oeuvre de ce procédé.
Publication
Application
Priority
JP 23125393 A 19930917
Abstract (en)
A film forming apparatus comprises a film forming system comprising a film forming arrangement necessary for forming films; and a film monitoring system comprising a light source (40), a light-transmissive solid member (38), a signal transmitting means for transmitting light signals to the light-transmissive solid member (38), a driving unit for driving the light-transmissive solid member (38) for rotation about the optical axis of the light signals, an optical measuring unit comprising a spectroscope (53) and an optical detector (55), and a calculating unit (48). A film forming method comprises measuring the attenuation factor of transmitted light transmitted through a light-transmissive solid member (38) and attenuated by a thin film formed over the surface of the light-transmissive solid member (38) as a function of the wavelength of the transmitted light, and controlling film forming conditions according to data representing changes in the thickness and the optical constant of a thin film formed over the surface of a film monitor (36) formed in the light-transmissive solid member (38), in a real-time control mode taking multiple interference in the thin film into consideration. <IMAGE>
IPC 1-7
IPC 8 full level
C23C 14/54 (2006.01); C23C 16/52 (2006.01)
CPC (source: EP KR)
C23C 14/545 (2013.01 - EP); C23C 16/52 (2013.01 - EP KR); G01B 11/0625 (2013.01 - KR); G05D 5/02 (2013.01 - KR); G06V 30/1444 (2022.01 - EP)
Citation (search report)
- [A] EP 0233610 A2 19870826 - SONY CORP [JP]
- [A] US 4936964 A 19900626 - NAKAMURA KENJI [JP]
- [A] EP 0545699 A1 19930609 - HUGHES AIRCRAFT CO [US]
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 0652304 A1 19950510; JP H0790593 A 19950404; KR 950008716 A 19950419
DOCDB simple family (application)
EP 94114707 A 19940919; JP 23125393 A 19930917; KR 19940019589 A 19940809