EP 0660337 A2 19950628 - Metal oxide film resistor and method for producing the same.
Title (en)
Metal oxide film resistor and method for producing the same.
Title (de)
Metalloxid-Dünnschichtwiderstand und Herstellungsverfahren.
Title (fr)
Résistance en film mince d'oxyde de métal et méthode de fabrication.
Publication
Application
Priority
- JP 32658893 A 19931224
- JP 2020994 A 19940217
Abstract (en)
A metal oxide film resistor comprises mainly zinc oxide and an auxiliary oxide of at least one metal added as an activator for covering a wide range of resistance of from 1 k OMEGA to 10 M OMEGA . A method of producing such a metal oxide film resistor comprises the steps of preparing a solution composed of at least a zinc salt, and forming a zinc oxide film (2) on an insulating substrate (1) by supplying a vapor of the solution to the insulating substrate (1) heated to a temperature at which the zinc salt thermally decomposes and by thermally decomposing the zinc salt on the surface of the insulating substrate (1). <IMAGE>
IPC 1-7
IPC 8 full level
H01C 7/112 (2006.01)
CPC (source: EP)
H01C 7/112 (2013.01)
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
DOCDB simple family (application)
EP 94120409 A 19941222