Global Patent Index - EP 0660757 B1

EP 0660757 B1 2000-01-19 - WAFER RETAINING PLATEN AND LIFTING MEANS

Title (en)

WAFER RETAINING PLATEN AND LIFTING MEANS

Title (de)

WAFERHALTEPLATTE UND HEBEVORRICHTUNG

Title (fr)

PLATINE DE RETENUE ET MOYENS DE LEVAGE POUR TRANCHES

Publication

EP 0660757 B1 (EN)

Application

EP 94920197 A

Priority

  • US 9406708 W
  • US 7650993 A

Abstract (en)

[origin: US5350427A] An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece.

IPC 1-7 (main, further and additional classification)

B05C 13/00; B05C 11/02; H01L 21/00

IPC 8 full level (invention and additional information)

H01L 21/683 (2006.01); H01L 21/265 (2006.01); H01L 21/687 (2006.01)

CPC (invention and additional information)

H01L 21/68721 (2013.01); H01L 21/68742 (2013.01); Y10T 29/41 (2013.01); Y10T 279/247 (2013.01)

Designated contracting state (EPC)

DE FR GB IT NL SE

DOCDB simple family

US 5350427 A 19940927; CN 1047331 C 19991215; CN 1110869 A 19951025; DE 69422700 D1 20000224; DE 69422700 T2 20000831; EP 0660757 A1 19950705; EP 0660757 A4 19951025; EP 0660757 B1 20000119; JP 3381173 B2 20030224; JP H10508153 A 19980804; WO 9429036 A1 19941222