EP 0660757 B1 20000119 - WAFER RETAINING PLATEN AND LIFTING MEANS
Title (en)
WAFER RETAINING PLATEN AND LIFTING MEANS
Title (de)
WAFERHALTEPLATTE UND HEBEVORRICHTUNG
Title (fr)
PLATINE DE RETENUE ET MOYENS DE LEVAGE POUR TRANCHES
Publication
Application
Priority
- US 9406708 W 19940613
- US 7650993 A 19930614
Abstract (en)
[origin: US5350427A] An apparatus for releasably holding a workpiece in semiconductor process systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of the platen for clamping the wafer against the fence of the supporting means and pusher means mounted on wafer lift means for engagement with the lever mechanism for locking and unlocking the device, and sensing any misclamp of the workpiece.
IPC 1-7
IPC 8 full level
H01L 21/683 (2006.01); H01L 21/265 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
B05C 13/00 (2013.01 - KR); H01L 21/68721 (2013.01 - EP KR US); H01L 21/68742 (2013.01 - EP KR US); Y10T 279/247 (2015.01 - EP US)
Designated contracting state (EPC)
DE FR GB IT NL SE
DOCDB simple family (publication)
US 5350427 A 19940927; CN 1047331 C 19991215; CN 1110869 A 19951025; DE 69422700 D1 20000224; DE 69422700 T2 20000831; EP 0660757 A1 19950705; EP 0660757 A4 19951025; EP 0660757 B1 20000119; JP 3381173 B2 20030224; JP H10508153 A 19980804; KR 100304998 B1 20020622; KR 950702876 A 19950823; WO 9429036 A1 19941222
DOCDB simple family (application)
US 7650993 A 19930614; CN 94190380 A 19940613; DE 69422700 T 19940613; EP 94920197 A 19940613; JP 50218195 A 19940613; KR 19950700544 A 19950213; US 9406708 W 19940613