EP 0671263 A1 19950913 - Transport system with electrostatic substrate retention device.
Title (en)
Transport system with electrostatic substrate retention device.
Title (de)
Transportsystem mit elektrostatischer Substrathalterungsvorrichtung.
Title (fr)
Système de transport avec dispositif de maintien électrostatique des feuilles.
Publication
Application
Priority
US 19527994 A 19940214
Abstract (en)
A transport system comprises a carrier in the form of a belt, drum or reciprocating member (10) having a surface and arrays of first and second conductors (34, 36) extending under that surface generally parallel to one another, each second conductor being spaced close to a first conductor to define a narrow gap between them. A voltage source (42) applies a potential difference between the conductors to produce electrostatic fields at said gaps which can attract and hold a substrate to said carrier surface. Switching is provided so that a potential difference is applied only between selected ones of the first and second conductors so as to control the areas of the carrier surface to which the substrate is held. In the case of a transport with a belt-type carrier, indicia (52, 56) may be applied to the belt enabling the longitudinal and lateral positions of the belt to be monitored to achieve predictive positioning of the substrate relative to successive work stations serviced by the transport. <IMAGE>
IPC 1-7
IPC 8 full level
B41J 2/525 (2006.01); B41F 21/00 (2006.01); B65G 15/64 (2006.01); B65H 5/00 (2006.01); B65H 5/02 (2006.01); G03G 15/00 (2006.01)
CPC (source: EP)
B41F 21/005 (2013.01); B65H 5/004 (2013.01); B65H 2404/251 (2013.01)
Citation (search report)
- [XA] US 5121170 A 19920609 - BANNAI KAZUNORI [JP], et al
- [A] WO 8300658 A1 19830303 - HYLLBERG BRUCE E [US]
- [A] US 5246099 A 19930921 - GENOVESE FRANK C [US]
- [A] FR 2222846 A5 19741018 - HONEYWELL BULL SOC IND [FR]
- [T] US 5295571 A 19940322 - VAN DEN BOGAERT JEAN-FRANCOIS [FR], et al
- [A] PATENT ABSTRACTS OF JAPAN vol. 010, no. 270 (M - 517)<2326> 13 September 1986 (1986-09-13)
- [A] PATENT ABSTRACTS OF JAPAN vol. 010, no. 315 (M - 529) 25 October 1986 (1986-10-25)
Designated contracting state (EPC)
CH DE ES FR GB LI NL SE
DOCDB simple family (publication)
EP 0671263 A1 19950913; CN 1071264 C 20010919; CN 1121033 A 19960424; DE 671263 T1 19960919; JP H07285698 A 19951031; SG 48706 A1 19980518; TW 339028 U 19980821
DOCDB simple family (application)
EP 95300898 A 19950214; CN 95102723 A 19950213; DE 95300898 T 19950214; JP 2512595 A 19950214; SG 1995002227 A 19950214; TW 85212858 U 19950213