EP 0673054 B1 19970827 - Ion implanter and method for implanting an ion beam
Title (en)
Ion implanter and method for implanting an ion beam
Title (de)
Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls
Title (fr)
Implanteur d'ions et méthode pour implanter un faisceau d'ions
Publication
Application
Priority
US 21224794 A 19940314
Abstract (en)
[origin: EP0673054A1] An ion implanter (56) consists of: a) an oscillator (58) for providing a fixed frequency y-signal; b) a modulator (54) for providing a variable x-signal; c) a scan amplifier (60) adapted for buffering and phase-modulating the y signal into two y scan signals of opposing phase, and for buffering and phase-modulating the x signal into two x scan signals of opposing phase; and d) a pair of x-deflectors (62a,62b) connected to receive x-scan signals and a pair of y-deflectors (62c,62d) connected to receive y-scan signals. More specifically, an ion implanter as above wherein the modulator comprises: e) first and second waveform generators (64,66) connected in series; and f) input and output to second waveform generator, wherein the input receives a triangular wave of fixed frequency and the output produces the x-signal having a frequency which varies in direct proportion to the voltage of the triangular wave. Thus frequency-modulated movement of the ion-beam across the wafer is achieved. Also claimed is a method for ion-implanting a wafer using the appts. cited above.
IPC 1-7
IPC 8 full level
G21K 5/04 (2006.01); C23C 14/48 (2006.01); H01J 37/147 (2006.01); H01J 37/317 (2006.01); H01L 21/265 (2006.01)
CPC (source: EP US)
H01J 37/1474 (2013.01 - EP US); H01J 37/3171 (2013.01 - EP US); H01J 2237/1504 (2013.01 - EP US); H01J 2237/31701 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE DE DK ES FR GB GR IE IT LU NL PT SE
DOCDB simple family (publication)
EP 0673054 A1 19950920; EP 0673054 B1 19970827; AT E157481 T1 19970915; DE 69500594 D1 19971002; JP H0836987 A 19960206; US 5418378 A 19950523
DOCDB simple family (application)
EP 95301339 A 19950302; AT 95301339 T 19950302; DE 69500594 T 19950302; JP 5136895 A 19950310; US 21224794 A 19940314