EP 0674106 A1 19950927 - A multistage vacuum pump.
Title (en)
A multistage vacuum pump.
Title (de)
Mehrstufige Vakuumpumpe.
Title (fr)
Pompe à vide à plusieurs étages.
Publication
Application
Priority
JP 7020094 A 19940316
Abstract (en)
A multistage vacuum pump which provides a high ultimate vacuum at a low heat generation rate. The pump includes a plurality of Roots vacuum pump units (3, 5, 7 and 9) connected in series. The pumps in all stages have discrete casings (11). Pump chambers (13) are communicated with each other in series by connecting the outlet of the front-stage pump unit and the inlet of the rear-stage pump unit in each pair of adjacent Roots vacuum pump units by exhaust pipes (35, 37, 39, 41 and 43). Rotors (15 and 17) of the Roots vacuum pump units are carried on discrete driving and driven shafts so that the rotors can be driven to rotate at different speeds. <IMAGE>
IPC 1-7
IPC 8 full level
F04C 23/00 (2006.01); F04C 28/08 (2006.01)
CPC (source: EP KR)
F04C 2/28 (2013.01 - KR); F04C 23/001 (2013.01 - EP); F04C 28/08 (2013.01 - EP)
Citation (search report)
- [Y] US 2936107 A 19600510 - BLACKBURN GEORGE T
- [Y] DE 3444169 A1 19860612 - LOEWE PUMPENFABRIK GMBH [DE]
- [A] DE 9306559 U1 19930701
- [A] GB 809443 A 19590225 - HERAEUS GMBH W C
Designated contracting state (EPC)
DE ES FR GB IT
DOCDB simple family (publication)
EP 0674106 A1 19950927; CN 1112649 A 19951129; KR 950033092 A 19951222
DOCDB simple family (application)
EP 95103183 A 19950306; CN 95102869 A 19950315; KR 19950005362 A 19950315