EP 0676772 A1 19951011 - X-ray windows.
Title (en)
X-ray windows.
Title (de)
Röntgenstrahlenfenster.
Title (fr)
Fenêtres pour rayons.
Publication
Application
Priority
GB 9407073 A 19940409
Abstract (en)
An X-ray window comprising a membrane of diamond one surface of which has formed upon it an array of diamond ribs so as to provide an integral supporting structure. Methods of manufacturing also are described. <IMAGE>
IPC 1-7
IPC 8 full level
C01B 31/06 (2006.01); C23C 14/06 (2006.01); C23C 16/02 (2006.01); C23C 16/26 (2006.01); C23C 16/27 (2006.01); C23C 16/56 (2006.01); C23F 1/00 (2006.01); G21K 1/10 (2006.01); G21K 5/00 (2006.01); H01J 35/18 (2006.01)
CPC (source: EP)
G21K 1/10 (2013.01)
Citation (search report)
- [XA] EP 0476827 A1 19920325 - SUMITOMO ELECTRIC INDUSTRIES [JP]
- [A] WO 9300685 A1 19930107 - MUELLER MARGHERITA T & LF [US], et al
- [A] US 5039203 A 19910813 - NISHIKAWA AKIRA [JP]
- [A] DATABASE INSPEC INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; RAVET M F ET AL: "Realization of x-ray lithography masks based on diamond membranes" & MATERIALS ASPECTS OF X-RAY LITHOGRAPHY. SYMPOSIUM, MATERIALS ASPECTS OF X-RAY LITHOGRAPHY. SYMPOSIUM, SAN FRANCISCO, CA, USA, 12-14 APRIL 1993, 1993, PITTSBURGH, PA, USA, MATER. RES. SCO, USA, pages 103 - 109
Designated contracting state (EPC)
DE FR IT
DOCDB simple family (publication)
EP 0676772 A1 19951011; EP 0676772 B1 19971029; DE 69500941 D1 19971204; DE 69500941 T2 19980305; GB 9407073 D0 19940601; JP H07294700 A 19951110
DOCDB simple family (application)
EP 95301965 A 19950324; DE 69500941 T 19950324; GB 9407073 A 19940409; JP 8389495 A 19950410