EP 0680071 A2 19951102 - Protective collar for a vacuum seal in a plasma etch reactor.
Title (en)
Protective collar for a vacuum seal in a plasma etch reactor.
Title (de)
Schutzmanschette für Vakuumdichtung in einem Plasma-Ätzreaktor.
Title (fr)
Collier de protection de joint à vide dans un réacteur de gravure à plasma.
Publication
Application
Priority
US 23560294 A 19940429
Abstract (en)
The disclosure relates to a vacuum seal that can be used in a plasma etch reactor to seal the chamber interior (10) from the outside environment consists of a protective collar (66) that is injection molded or machined of a high strength, high temperature and corrosion resistant thermoplastic material. The collar has an elastomeric gasket (68) installed therein and is used in combination with a second elastomeric gasket (76) to achieve a fluid-tight seal between two rigid surfaces (74,72) made of silicon and quartz, respectively. <IMAGE>
IPC 1-7
IPC 8 full level
B01J 3/00 (2006.01); H01J 37/18 (2006.01); H01J 37/32 (2006.01); H01L 21/205 (2006.01); H01L 21/302 (2006.01); H01L 21/3065 (2006.01)
CPC (source: EP KR US)
H01J 37/18 (2013.01 - EP US); H01J 37/32431 (2013.01 - EP US); H01L 21/3065 (2013.01 - KR); H01L 21/67126 (2013.01 - EP US); H01J 2237/166 (2013.01 - EP US); Y10S 277/913 (2013.01 - EP US)
Designated contracting state (EPC)
BE CH DE ES FR GB IT LI NL SE
DOCDB simple family (publication)
EP 0680071 A2 19951102; EP 0680071 A3 19960403; JP H08227876 A 19960903; KR 950034580 A 19951228; US 5722668 A 19980303
DOCDB simple family (application)
EP 95302587 A 19950419; JP 10755095 A 19950501; KR 19950010293 A 19950428; US 23560294 A 19940429