EP 0688026 A1 19951220 - Resistor coated on diamond substrate
Title (en)
Resistor coated on diamond substrate
Title (de)
Widerstand auf einem Substrat aus Diamant
Title (fr)
Resistance déposée sur un substrat en diamant
Publication
Application
Priority
- US 26210794 A 19940617
- US 34765994 A 19941201
Abstract (en)
A thin film resistance layer is deposited on a diamond substrate. A nickel-chromium-carbon alloy with improved adhesion of the metal to the diamond substrate and a desirably low temperature coefficient of resistance is created.
IPC 1-7
IPC 8 full level
H05K 1/16 (2006.01); C23C 30/00 (2006.01); C30B 29/04 (2006.01); H01C 7/00 (2006.01); H01L 23/14 (2006.01)
CPC (source: EP KR)
H01C 7/00 (2013.01 - KR); H01C 7/006 (2013.01 - EP)
Citation (search report)
- [A] DAVID NORWOOD ET AL.: "Diamond - A New High Thermal Conductivity Substrate for Multichip Modules and Hybrid Circuits", PROCEEDINGS OF IEEE 43RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, 1 June 1993 (1993-06-01) - 4 June 1993 (1993-06-04), ORLANDO, FL, USA, pages 910 - 919
- [A] CD IACOVANGELO ET AL.: "Metallizing CVD Diamond for Electronic Applications", PROCEEDING OF 1993 INTERNATIONAL SYMPOSIUM ON MICROELECTRONIS, 9 November 1993 (1993-11-09) - 11 November 1993 (1993-11-11), DALLAS, TEXAS, pages 132 - 138
- [A] F. HEGNER: "The industrial production of High Quality Nickel-Chromium Resistors with Controlled Temperature Coefficient of Resistance", THIN SOLID FILMS, vol. 57, no. 2, LAUSANNE, pages 359 - 362
Designated contracting state (EPC)
BE DE ES FR GB IT
DOCDB simple family (publication)
EP 0688026 A1 19951220; JP H08130102 A 19960521; KR 970003292 A 19970128
DOCDB simple family (application)
EP 95303424 A 19950523; JP 14503895 A 19950613; KR 19950015992 A 19950616