EP 0689722 A1 19960103 - METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL
Title (en)
METHOD AND APPARATUS FOR DOPING A SOLID MATERIAL
Title (de)
GERAET UND VERFAHREN ZUM DATIEREN VON FESTSTOFFMATERIAL
Title (fr)
PROCEDE ET APPAREIL POUR DOPER UN MATERIAU SOLIDE
Publication
Application
Priority
EP 9300522 W 19930308
Abstract (en)
[origin: WO9420991A1] A doping method for a solid host material (2), preferably a film, using an electrochemical cell (1, 2, 5, 6) and the host material (2) as one of the electrodes, wherein the doping is confined to a selected region of the host material by using either a specially designed counterelectrode, for example a tip (1), or by covering the host material (2) by a layer with the exception of the selected region. The method is especially suitable for using oxygen as dopant and the preparation of oxide superconductors. By using control devices and (piezoelectric) transducers known from the scanning tunneling microscope, doped regions of submicron resolution can be produced.
IPC 1-7
IPC 8 full level
C25D 15/02 (2006.01); C30B 31/06 (2006.01); H01L 21/228 (2006.01); H01L 21/38 (2006.01); H01L 21/479 (2006.01); H01L 39/24 (2006.01)
CPC (source: EP)
H10N 60/0661 (2023.02); H10N 60/0941 (2023.02); G01Q 80/00 (2013.01)
Citation (search report)
See references of WO 9420991A1
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
WO 9420991 A1 19940915; EP 0689722 A1 19960103; JP 2812454 B2 19981022; JP H08503339 A 19960409
DOCDB simple family (application)
EP 9300522 W 19930308; EP 93905317 A 19930308; JP 51949594 A 19930308