EP 0692729 A1 19960117 - PLANAR TYPE GALVANOMIRROR HAVING A DISPLACEMENT DETECTING FUNCTION AND METHOD FOR PRODUCING THE SAME
Title (en)
PLANAR TYPE GALVANOMIRROR HAVING A DISPLACEMENT DETECTING FUNCTION AND METHOD FOR PRODUCING THE SAME
Title (de)
PLANARER GALVANOSPIEGEL MIT VERSCHIEBUNGSDETEKTOR
Title (fr)
MIROIR GALVANOPLASTIQUE DE TYPE PLAN PRESENTANT UNE FONCTION DE DETECTION ET PROCEDE DE PRODUCTION DE CELUI-CI
Publication
Application
Priority
- JP 9500066 W 19950123
- JP 982494 A 19940131
Abstract (en)
The present invention relates to a small-sized thin galvanomirror for detecting the displacement angle of a mirror, which is produced by a semiconductor process. By using a semiconductor process, a movable plate (5) and a torsion bar (6) for supporting this movable plate (5) are integrally formed on a silicon substrate (2), and a planar coil (7) and a total reflection mirror (8) are formed on the upper surface of the movable plate (5). Permanent magnets (10A, 10B) and (11A, 11B) for generating magnetic fields are fixedly disposed on the planar coil (7) to thereby control the amount and direction of current to be conducted to the planar coil (7) so as to variably control the swinging angle of the movable plate (5) through the balance between a magnetic force generated and a torsional force by the torsion bar (6). Furthermore, detecting coils (12A, 12B) are provided below the movable plate (5) to thereby cause a detection current to flow to the planar coil (7) by superposing it on a driving current, whereby the detection of a displacement angle of the mirror is performed through the relative inductance variation between the planar coil (7) and the detection coils (12A, 12B) based on this detection current. <MATH>
IPC 1-7
IPC 8 full level
G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC (source: EP KR US)
G02B 26/0816 (2013.01 - EP US); G02B 26/0841 (2013.01 - EP US); G02B 26/10 (2013.01 - KR); G02B 26/105 (2013.01 - EP US)
Designated contracting state (EPC)
DE FR
DOCDB simple family (publication)
US 5767666 A 19980616; DE 69530248 D1 20030515; DE 69530248 T2 20031211; EP 0692729 A1 19960117; EP 0692729 A4 19951123; EP 0692729 B1 20030409; JP 2657769 B2 19970924; JP H07218857 A 19950818; KR 100232692 B1 19991201; KR 960702116 A 19960328; TW 255064 B 19950821; WO 9520774 A1 19950803
DOCDB simple family (application)
US 53010395 A 19950926; DE 69530248 T 19950123; EP 95906502 A 19950123; JP 9500066 W 19950123; JP 982494 A 19940131; KR 19950704213 A 19950929; TW 84100772 A 19950127